Method for producing an integrated device

ABSTRACT

An article for producing an integrated device includes a deformable layer and one or more components releasably attached on one surface of the deformable layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.12/275,276, filed Nov. 21, 2008, now U.S. Pat. No. 8,201,325, whichclaims priority to European Patent Application No. 07121352.4, filedNov. 22, 2007, and all the benefits accruing therefrom under 35 U.S.C.§119, the contents of which in its entirety are herein incorporated byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to the field of producing integrateddevices by attaching one or more separately produced components on asurface of a substrate.

2. Description of the Related Art

Electronic systems are composed of logic blocks, i.e. processors andmemories, as well as communication buses. A significant portion of theloss of performance in such electronic systems results from thepropagation time of electrical signals in interconnections between thesecomponents. A Systems-on-Chip (SOC) approach allows a reduction of theseinterconnection lengths in that the components of the system arecohabited on a single substrate, preferably by integrating all thecomponents into a single chip. Different functional components such asRF MEMS, optical MEMS, III-V circuits, SiGe circuits, and the like,usually are produced using different non-compatible process technologiessuch that an integration on the same substrate is complex to achieve.

Presently, the options to achieve wafer scale level integration include:first, place separate components side by side, i.e. laterally, second,is to stack the components on a main surface of a base substrate or ontop of each other to achieve a vertical integration, and third, acombination of lateral and vertical integration.

A conventional technique for stacking one or more components on a deviceor on a substrate includes, for example, allowing for transferringcomponents from a source substrate to a receiver surface of thereceiving device or the receiving substrate by aligning the sourcesubstrate carrying the components with the receiver surface, by bringingthe components of the source substrate into contact with the receiversurface, by releasing the components from the source substrate such thatthe components are placed on the receiver surface and by finallyremoving the source substrate.

One important precondition to apply such a process is that when thesource substrate is aligned with the receiver surface all of thecomponents to be placed may come into full contact with respectivecontact areas of the receiver surface. This substantially requires thatthe respective contact areas of the receiver surface, onto which thecomponents are to be placed, and the contact surface of the components,to be brought into contact with the areas of the receiver surface,correspond to each other. Preferably, both the areas of the receiversurface and the contact surfaces of the components to be attachedthereon are planar and in parallel with a lateral dimension of thereceiver surface. In other words, after bringing the components of thesource substrate into contact with the receiver surface, the contactsurfaces of the components substantially fully abut on the respectivecontact areas of the receiver surface.

The stacking of a plurality of devices onto each other using a transfertechnology as explained above is generally realized when the contactsurface of the devices attached on the source substrate and the contactareas of the receiver surface are at a horizontal uniform level.However, the application of components at wafer scale level on receiversubstrates having a non-even topography using the above process isrestricted.

U.S. Pat. No. 7,071,031 discloses an arrangement in which a MEMSstructure is attached to the surface of a chip by means of metal studconnected to an anchor portion of the MEMS structure.

In “CMOS compatible wafer-level microdevice-distribution technology” byR. Guerre et al., Transducers 2007 International, page 2087-2090, June2007, a device integration method is disclosed using AFM cantilevers asa test vehicle and distributing those to receiver wafers.

U.S. Application No. 20030087476 discloses a manufacturing process fordisplays in which a light emitting element is transferred by peeling theelement from one substrate and bonding the removed element on anothersubstrate using a cementing layer.

In U.S. Application No. 20070164463, a pattern transfer device isdisclosed for usage in optical disk manufacturing processes. The devicepresses a transfer die having a concavo-convex pattern against atransfer target on a substrate to transfer the concavo-convex patternonto a surface of the transfer target.

In U.S. Application No. 20060035164, a method for the duplication ofmicroscopic patterns from a master to a substrate is disclosed in whicha replica of a topographic structure on a master is formed andtransferred when needed onto a receiving substrate using one of avariety of printing or imprint techniques, and then dissolved.

In U.S. Application No. 20060180595, a wafer that comprises a pluralityof dies is attached to a surface of a tape structure. A grid of groovesis formed in the wafer to separate the plurality of dies on the surfaceof the tape structure. A portion of the tape structure that isaccessible through the grooves of the grid is caused to harden into agrid shaped structure. The grid shaped structure removably holds theplurality of dies.

U.S. Application No. 20030114001 discloses the formation of asemiconductor device that involves bonding a donor substrate to areceiving substrate via a donor mesa, and removing a bulk portion whileleaving the transferred layer of the donor substrate bonded to thereceiving substrate.

In the article, “Wafer-Level 3D Integration Technology Platforms for ICsand MEMS”, F. Niklaus, et al., describe adhesive wafer bonding forintegrating high performance transducers with electronic circuits forarrayed highly-integrated sensor and actuator components.(http://www.ee.kth.se/php/modules/publications/reports/2005/IR-EE-MST_(—)2005_(—)001.pdfaccessed on Nov. 21, 2007.)

So far, no practical solution has been shown for transfer of componentsto a receiver surface having uneven topography, such as, areas on thereceiver surface having different levels with respect to the lateraldimension of the receiver surface, cavities, and tilted areas.

Therefore, it is one object of the present invention to provide a methodfor producing integrated devices having one or more separately madecomponents attached on a receiver surface of a receiving device or areceiving substrate wherein the components can be attached even if thereceiver surface has an uneven topography.

SUMMARY

Accordingly, in one aspect, the present invention provides a method forproducing an integrated device. A source substrate carries one or morecomponents to be attached to a receiver surface. The receiver surfacehas as uneven topography. The source substrate includes a deformablelayer on a surface on which the one or more components are carried. Thesource substrate is aligned such that the one or more components carriedthereon face respective contact areas of the receiver surface. Thesource substrate is moved toward the receiver surface such that the oneor more components are brought into contact with the respective contactareas wherein the deformable layer is deformed at least partially. Thesource substrate is removed such that the one or more components remainlocated on the respective contact areas of the receiver surface.Preferably, the receiver surface comprises the surface of a receivingsubstrate and the surface of a receiving device mounted on the receivingsubstrate.

According to another aspect of the present invention, an article used inproducing an integrated device is provided including a deformable layer,and one or more components releasably attached on one surface of thedeformable layer. The article may preferably include a supportingsubstrate attached on a surface of the deformable layer opposite to thesurface on which the components are placed.

According to another aspect of the present invention, a device isprovided including the above described article, a receiver surfacehaving a topography with a main receiver surface and a contact area inat least one of a recessed area, an elevated area, and a tilted area ofthe receiver surface, wherein one of the components attached to thesource device is brought into contact with the contact area such thatthe deformable layer is squeezed in at least one region.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of example,with reference to the accompanying drawings in which:

FIGS. 1 a to 1 e show the process steps of a method for producing anintegrated device comprising a plurality of components according to anembodiment;

FIGS. 2 a and 2 b show process states of the method for producing anintegrated device wherein components are attached into cavities on areceiver surface before and after the transfer, respectively;

FIGS. 3 a and 3 b show process states of the method for producing anintegrated device wherein components are attached on surfaces ofdifferent levels of a receiver surface before and after the transfer,respectively;

FIGS. 4 a and 4 b show process states of the method for producing anintegrated device having components attached on surfaces of differentlevels and on tilted surfaces on a receiver substrate before and afterthe transfer, respectively;

FIGS. 5 a to 5 k show the process states in detail producing anintegrated MEMS device using the method according to an embodiment ofthe present invention;

FIGS. 6 a to 6 c show process states for producing an electricalinterconnect on a substrate having a topography wherein contacts to beconnected are on different levels;

FIGS. 7 a to 7 c show process states of the method according to afurther embodiment for producing a coil structure on a substrate;

FIGS. 8 a to 8 c show process states of a method for producing apre-stressed actuator with bistable behavior; and

FIG. 9 shows a further embodiment of a device produced with the methodfor producing an integrated device which allows a 3D field measurementusing magnetic sensors.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An underlying idea of the present invention is to provide the one ormore components on a deformable layer which absorbs topographyvariations of a receiver surface. The deformable layer followstopographic unevenness while moving the components toward the respectivecontact areas on the receiver surface. Components on the sourcesubstrate are transferred to respective contact areas of a receiversubstrate in that the components are allowed to fit to the level of therespective contact area and/or to the inclination of the respectivecontact area. Lastly, the components get attached to the respectivecontact area before the source substrate is removed.

In a preferred step, the one or more components are at least partiallyreleased from the deformable layer before removing the source substrate.In addition, the step of moving the source substrate toward the receiversurface such that the one or more components to be placed are broughtinto contact with the respective contact areas may preferably beperformed by applying a pressure between the deformable layer and thereceiver surface such that the deformable layer is squeezed by at leastone of the one or more components. The pressure force may preferably beinduced by pressing together the source substrate and a receiversubstrate on which receiving devices may be mounted together.

According to another preferred embodiment, heat may be applied to atleast the deformable layer while or before the step of moving the sourcesubstrate toward the receiver surface, in order to soften the deformablelayer.

In yet another embodiment, the source substrate can preferably bealigned such that the components carried thereon are associated with arespective contact area on the receiver surface, wherein the contactarea is recessed or elevated with respect to a main surface of thereceiver surface, and/or tilted with respect to a main surface of thereceiver surface. Such recessed and/or elevated and/or tilted portionsof the receiver surface may preferably cause the unevenness of thereceiver surface. Such portion may be caused by a device mounted on thereceiving substrate.

Preferably, the source substrate carrying the components is formed withthe steps of: (1) providing the components on a surface of a substrate;(2) applying an encapsulation material on the components to provide aplane surface; (3) applying deformable layer material on the planesurface; and (4) removing the substrate and the encapsulation materialbetween or besides the components such that the components areseparately attached to the deformable layer.

On a surface of the deformable layer opposing to the surface on whichthe components are placed, a supporting substrate may preferably beattached. Further, the components may preferably be released from thedeformable layer by applying a selective laser ablation process byilluminating the contact region between the deformable layer and therespective component with laser light.

According to another embodiment, the respective contact areas may beprovided with an adhesive means before the one or more components arebrought into contact with the respective contact areas, wherein therespective contact areas are adapted to fixate the one or morecomponents at least against the removing of the source substrate.

The components may preferably include at least one of a mechanicalelement, an electronic element, a sensor element, an actuator element, afluidic element, an optical element and an interconnect element.

According to another aspect of the present invention, an electricaldevice having a coil structure fabricated with the above describedmethod is provided wherein, as a component, a conductive layer isprovided and wherein the uneven topography is formed by a protrudingstructure, wherein, after the component has been transferred to asurface of the protruding structure, the protruding structure is removedleaving a loop of the conductive layer extending from the receiversurface.

According to another aspect, a sensor arrangement for multidimensionalmeasuring of electrical or magnetic fields fabricated with one of theabove described methods is provided, wherein a substrate having arecessed portion having an inclined sidewall is provided, wherein as acomponent a field sensor is provided, and wherein at least one of thecomponents is transferred to the inclined sidewall of the recessedportion.

The present invention can be understood easily by means of the followingdetailed description which is provided with reference to the attacheddrawings illustrating examples thereof. Embodiments of the presentinvention will now be described with reference to these attacheddrawings. Wherever possible, identical parts have been allocatedidentical reference symbols and duplicate descriptions thereof have beenomitted.

In FIGS. 1 a to 1 e process states are shown illustrating an embodimentof the proposed method for producing an integrated device. Theintegrated device is built with a plurality of components 2 to beattached on a receiving substrate 3. The receiving substrate 3 can be awafer made of silicon or any other suitable material. The receivingsubstrate 3 can be raw or can provide functional elements such aselectronic elements, interconnection wiring, mechanical elements and thelike, which are necessary to provide a part of the functionally of theintegrated device to be produced.

The receiving substrate 3 has a receiver surface 11 with a specificuneven topography having elevated portions 4 of and protruding from thereceiver surface 11 of the receiving substrate 3. The elevated portions4 have tilted surfaces which represent contact areas 9 on which thecomponents 2 are to be attached.

In a first step the components 2 are produced on a base substrate 5using a suitable technology, as shown in FIG. 1 a. For example, siliconelectronic components can be produced using silicon technology ascommonly known in the art. Further, types of components 2 include, forexample, optical components, magnetic components, electro-opticalcomponents and components having micro and/or nanostructures. The basematerial of the components 2 is substantially arbitrary as long as it issuitable to produce the component.

After having placed the components 2 on the surface of the basesubstrate 5 the components 2 are transferred to a source substrate 6, asshown in FIG. 1 b. This may be performed by bringing the sourcesubstrate 6 into contact with an outer surface of the components 2 onthe substrate 5 such that the components 2 are attached to the sourcesubstrate 6.

The source substrate 6 may be provided with a supporting element 8 and adeformable layer 7 applied on the supporting element 8. The deformablelayer 7 can be squeezed under pressure and/or heat such that thematerial of the deformable layer 7 is pushed away at portions wherepressure is applied thereby being able to adapt its shape to acorresponding contour which is pressed on.

The deformable layer 7 can be provided as an adhesive or with anadhesive and the like such that the components 2 stick to the deformablelayer 7. Thereafter, the components 2 may be released from the substrate5 using an appropriate process as is known in the art, such as,mechanical grinding, etching and the like. As a result, the components 2are fixed on the deformable layer 7 of the source substrate 6.

As shown in the process state of FIG. 1 c, the source substrate 6 havingthe components 2 attached thereon are aligned with a receiver substrate3 having a topography with tilted surfaces as contact areas 9 onelevated structures 4. The alignment is such that contact areas 9′ ofthe components 2 are positioned facing the tilted contact areas 9 in adirection perpendicular to the lateral extension of a main surface ofthe receiving substrate 3 facing the source substrate 6.

As shown with the process state of FIG. 1 d, the source substrate 6 ismoved towards the receiver surface such that the components 2 approachthe elevated structures 4 having the tilted contact areas 9. Uponapplying a pressure and/or heat between the source substrate 6 and thereceiver surface 11, the deformable layer 7 is squeezed (deformed) andallows the components 2 to sink into the deformable layer 7. Whilesinking into the deformable layer 7 the components 2 adapt theirrelative position to the tilted surface portions such that thecomponents 2 themselves are pivoted with respect to the receiver surface11. As a result, the contact surfaces 9′ of the components 2 abut thetilted surfaces at the respective contact areas 9 where the components 2are to be attached to.

The thickness of the deformable layer 7 is preferably selected accordingto the overall height of the step that has to be covered. Thus thethickness of the deformable layer 7 is preferably more than the overallheight of the step to be covered and, preferably, should be more than10% more of the overall height. The height of the step is preferablydefined as the biggest vertical elevation of the receiver surface withrespect to its main surface, or the biggest vertical recession in thereceiver surface with respect to its main surface. In case of elevationsand recessions both being included in the receiver surface, the heightof the step determining the thickness of the deformable layer 7preferably is determined by adding the biggest elevation and biggestrecession in the receiver layer. Furthermore, the thickness of thedeformable layer 7 should be selected depending on the viscosity of thedeformable layer 7 at the temperature of bonding. For example, the rangeof thickness of the deformable layer can vary from 10 micrometer toseveral hundreds of micrometers which allows absorbing a wide range oftopography.

During the process of moving the source substrate 6 towards the receiversurface 11 of the receiving substrate 3 (i.e. the bonding step) thematerial of the deformable layer 7 surrounds the protruding structuresof the topography of the receiver substrate 3 such that the surface ofthe deformable layer 7 comes close or comes into contact with thesurface of the receiving substrate 3.

Once the components 2 are brought into full abutment with the respectivecontact areas 9, i.e. the tilted surface of the elevated structures 4,the components 2 have to be released from the deformable layer 7 using asuitable process such as laser ablation, a heat processing, a UV releaseand the like. Also, the components 2 could be fixed to the respectivecontact areas 9 of the receiving surface which may be achieved by anadhesive applied to the contact areas 9 before bonding and/or on thecontact areas 9′ of the components. Alternatively, while applying heatfor releasing the components 2 from the deformable layer 7 the adhesiveof the contact area 9 is softened and may allow to fixate the component2 attached thereon.

As shown in FIG. 1 e, after releasing all of the components 2 orselectively releasing a part of the components 2 according to apre-selection, the source substrate 6, including the deformable layer 7,is removed leaving the receiver substrate 3 with the components 2attached thereon.

To ensure that the components 2 are fixed in their positions on thereceiver surface 11, the respective contact areas 9 or the contact areas9′ might be provided with an adhesive and the like to fixate thecomponents 2 thereon. In particular, during the process of removing thesource substrate 6 with the deformable layer 7 it should be ensured thatthe removing of the source substrate 6 does not replace or remove thecomponents 2 already placed on the respective contact areas 9 since theremoving of the receiver substrate 3 may apply a sticking force to thecomponents 2. After removing the deformable layer 7, the components 2are attached on the tilted surfaces of the elevated structures 4 suchthat the components 2 are also tilted with respect to the extension ofthe receiver surface 11.

As further shown in process state of FIG. 1 e, the cavities between theelevated structures 4 can be filled with a suitable filling material 12and the upper surface produced thereby can be planarized, e.g. bygrinding, such that an outer surface of the tilted components 2 and theouter surface of the filling material 12 are flush.

The above method can, for example, be used for producing a tape planarhead, the components 2 then include magnetic sensors. Such a planar headas a magnetic head for reading and/or writing in a mass storageequipment has advantages as the above described design may allowfabrication of an array of such sensors for parallel operation and/orsimplify fabrication testing.

The method described in conjunction with FIGS. 1 a to 1 e can besimilarly applied to situations shown in FIGS. 2 a to 2 b, FIGS. 3 a to3 b, and FIGS. 4 a to 4 b which differ from each other with respect ofthe topography of the receiver surface 11 of the receiving substrate 3.

FIGS. 2 a and 2 b show process states before and after the sourcesubstrate 6 and the receiver substrate 3 are brought into contact suchthat the contact areas 9′ of the components 2 associated with the sourcesubstrate 6 come into contact with respective contact areas 9 of thereceiver surface 11 where the components 2 are to be attached to.

FIGS. 2 a and 2 b illustrate the situation wherein components 2 are tobe positioned on contact areas 9 located within cavities of the receiversurface 11 formed between the elevated structures 4. The cavities have agreater depth than the thickness of the components 2 to be attachedtherein such that the surface portions of the deformable layer 7, ratherthan the components 2, come into contact with the elevated structures 4before the components 2 contact their respective contact areas 9. Due tothe capability of the deformable layer 7 to be squeezed, the elevatedstructures 4 which form the cavity penetrate the material of thedeformable layer 7 thereby allowing that the components 2 can be easilybrought into contact with the respective contact areas 9.

FIGS. 3 a to 3 b show process states before and after the sourcesubstrate 6 and the receiver substrate 3 are brought into contact suchthat the contact areas 9′ of the components 2 associated with the sourcesubstrate 6 come into contact with respective contact areas 9 of thereceiver surface 11 to where the components 2 are to be attached. FIGS.3 a to 3 b show another example where the components 2 shall bepositioned on contact areas 9 arranged on different levels on thereceiving substrate 3. While components 2 to be attached to elevatedcontact areas 9 squeeze the deformable layer 7, other components areallowed to come into contact with less elevated contact areas 9.

FIGS. 4 a to 4 b show process states before and after the sourcesubstrate 6 and the receiver substrate 3 are brought into contact suchthat the contact areas 9′ of the components 2 associated with the sourcesubstrate 6 come into contact with respective contact areas 9 of thereceiver surface 11. FIGS. 4 a to 4 b show another example for applyingthe above method to attach components from a source substrate 6 to areceiving substrate 3 having tilted contact areas 9 and contact areas 9having different levels. As can be seen in FIG. 4 b, components 2 can beplaced on the different contact areas 9 of the receiving substrate 3since the deformable layer 7 can be squeezed to surround any elevatedstructure and/or any component 2 and to allow the component(s) to beattached to tilted contact area(s) to incline.

Note that in all these embodiments the receiving surface 11 representsan uneven surface due to the structures 4 on the receiving substrate 3.The main surface of the receiving surface 11 is considered to be thesurface of the receiving substrate 3 itself, while the elevationstructures 4 and the receiving substrate 3 in combination form thereceiving surface 11 which faces the source substrate 6 including thecomponents 2 on the source substrate 6.

To further specify the process steps of the above described process ofproducing an integrated device an embodiment is described in moredetail. In the described example, the integrated device to be formed isa MEMS device (MEMS: microelectromechanical system). In FIGS. 5 a to 5k, process states are shown which illustrate the detailed process ofproducing the MEMS device.

In a first step, as shown in FIG. 5 a, the mechanical structures 21 ofthe device to be produced are fabricated on a base wafer 20 (basesubstrate) using well-known processes. In the shown embodiment,cantilevers 21 are formed as mechanical structures. Possible mechanicalstructures can be formed in silicon using well-known siliconmicro-technology.

Thereafter, as it is shown in the process state of FIG. 5 b, a firstpolyimide (PI) layer 22 is spun onto the surface of the substrate 20 inorder to planarize the surface and encapsulate the mechanical structures21. A Perfluor-Alkoxyalkan (PFA) layer 23 is then deposited on top ofthe first PI layer 22. On top of the PFA layer a supporting substrate 24is arranged. The supporting substrate 24 may be provided as atransparent glass wafer. For example, by using a temperature of 350° C.and a pressure of 2 bars the sandwich of the glass wafer and the basewafer 20 is bonded.

As shown in the process state of FIG. 5 c, the base wafer 20 which hasbeen used to fabricate the mechanical structures 21 thereon is removedin an appropriate process, for example, by grinding and dry etching(RIE). This process step gives access to the backside of the mechanicalstructures 21.

As shown in FIG. 5 d, a second polyimide (PI) layer 25 is spun on thebackside of the mechanical structures 21 and is cured thereafter.Further, an adhesive PI layer 26 with a lower glass transitiontemperature than the second PI layer 25 is spun above this second PIlayer 25 and cured. The adhesive PI layer 26 will allow the componentsto be formed to adhere to a receiver substrate 30 later.

FIG. 5 e shows a process state after a photolithography step followed bythe PI dry etch using O₂ plasma is performed in order to selectivelyremove portions of the first and second PI layer 25 that rigidly holdseach component with each other. As a result of this process separatedMEMS components 29 are produced on the PFA layer 23 which then can bedeformed and may follow the topography during a later bonding process.In FIG. 5 f the obtained substrate carrying the produced MEMS components29 is shown in a front view.

As it is illustrated in FIG. 5 g, the substrate carrying the components29 is aligned with a receiver substrate 30 having a specific topographyformed by elevated structures 31 protruding from the main surface of thereceiver substrate 30. On top of the elevated structures 31 elevatedsurface areas are contact areas 32 to accommodate respective components29. The substrate carrying the components 29 is aligned to the receiversubstrate 30 such that at least some of the components 29 are associatedwith the respective surface areas on top of the elevated structures 31as contact areas 32. Other components 29 are associated with surfaceareas of the receiver substrate 30 as contact areas 32 which are locatedbetween or besides the elevated structures 31.

As shown in the process state of FIG. 5 h, the substrate carrying thecomponents 29 is pushed (moved) towards the receiver substrate 30 andthereby brought into close contact with the receiver substrate 30. Theprocess of bonding is performed at a temperature of 400° C. and under apressure of 2 bars. Due to the temperature the PFA layer 23 is softenedto achieve a deformable texture. Due to the pressure (movement) the PFAlayer 23 is squeezed and pushed away by the components 29 contacting thecontact areas on the elevated structures. The PFA material is deformedsuch that it may surround each component 29 and elevated structure 31pressed into it. Thereby, the accommodating PFA material helps thatother components 29 may be transferred to contact areas 32 at a lowerlevel than the level of the contact areas 32 on the elevated structureon the receiver substrate 30 and to come into contact with these lowercontact areas 32.

As a next step the components 29 are released. For example, as shown inthe process states of FIG. 5 i and FIG. 5 j, when using of a glass wafer24 the component 29 can be released from the PFA layer 23 using a laserablation process to selectively ablate the first PI layer 22 such thatthe substrate carrying the components 29 can be removed from thereceiver substrate 30 leaving only those components 29 selected by thelaser ablation of the first PI layer 22 attached on the receiversubstrate 30 either on the lower contact areas of the receiver substrate30 or on the contact areas on the elevated structures 31.

The contact areas of the receiver substrate 32 and the contact areas ofthe components 29 might be prepared with a kind of adhesive or othermeasure before bonding the substrate carrying the components 29 suchthat the components 29 can be securely attached to the respectivecontact areas during the process of the bonding. Therefore, whenremoving the substrate carrying the components 29 the components 29securely remain attached on the receiver surface.

As shown in the process state of FIG. 5 h, the structures remaining onthe receiver substrate 30 may be cleaned in an oxygen plasma step andthe cantilevers may be released from the encapsulating PI material.

Instead of PFA, other materials can be selected to form the deformablelayer 7, 23. An essential characteristic of the deformable layermaterial is that it can be deformed under pressure, either whileapplying heat or not depending on the selected deformable material, suchthat level differences of the receiver substrate 30 between neighboredsurface areas are adjusted to adapt an area carrying a component, anelevated area and a recessed area. It is preferred that the deformationoccurs such that the deformable layer 7, 23 smoothly adapts to thetopography provided by the topography of the receiver substrate 30 andthe components 2, 29 to be attached thereon.

According to a further embodiment of the present invention, the methodfor producing a device can also be applied to provide a material layer,such as a metallic layer portion 41 for an electrical interconnection,onto a surface of a receiver substrate 40 having an uneven topography.Process states of such a method are shown in FIGS. 6 a to 6 c. On asource substrate 42, comprising a supporting substrate 43 and adeformable layer 44, the metallic layer portion 41 is carried whichshall form an interconnection line. The metallization is to be appliedon the receiver substrate 40 having an uneven topography with aprotruding structure 48 such that a first contact area 46 is located ona lower level of the receiver substrate 40 and a second contact area 47is located at an elevated level of the receiver substrate 40.

Preferably, the edge of the protruding structure 48 carrying theelevated surface area is not too steep and has an inclination whichprevents a break of the interconnection line of the source substrate 42due to mechanical stress while bonding. By bonding the source substrate42 to the receiver substrate 40 the metallic layer portion 41 ispartially pressed onto an area of the edge of the protruding structure48 of the receiver substrate 40. Thereby, the metallic layer portion 41deforms caused by the pressure obliged by the deforming deformable layermaterial 44. The metallic layer portion 41 and the deformable layer 44are deformed during the transfer to accommodate the topography step ofthe protruding structure 48.

As it is shown in the process state of FIG. 6 b the so formedinterconnection line 49 contacts the first contact area 46 at the lowerlevel of the receiver substrate 40 and the second contact area 47 on theelevated surface, thereby producing an electrical interconnectionbetween the contact areas 46, 47.

The contact areas and/or the edge region of the protruding structure 48might be prepared with a kind of adhesive or other measure beforebonding which allows the metallic layer portion 41 to be securelyattached to the contact areas 46, 47 and to the edge region of theprotruding structure 48 during the process of the bonding such that whenremoving the source substrate 42, including the deformable layer 44, theinterconnection line securely remains attached on the receiver substrate40, as shown in FIG. 6 c.

In FIGS. 7 a to 7 c process states of a process for forming coils on areceiver substrate 50 are depicted. 3D coils can be realized based on asame process as described with reference to FIGS. 6 a to 6 c showing theformation of electrical interconnections on a receiver substrate 40having uneven topography. The process state of FIG. 7 a shows that asource substrate 51, having a supporting substrate 52, and a deformablelayer 53 with an metallic layer portion 54 attached thereon, is broughtinto alignment with the receiver substrate 50 whereon an elevatedstructure 55 and contact areas 56 are located. As shown in FIG. 7 b, ina bonding process the source substrate 51 and the receiver substrate 50are bonded such that the metallic layer portion 54 is pressed onto theelevated structure 55 and the deformable layer 53 is deformed such thatthe metallic layer portion 54 accommodates the elevated structure 55.

As shown in FIG. 7 c, after removing the source substrate 51 with thedeformable layer 53, the elevated structure 55 is removed, for example,by an etching process such that the accommodated metallic layer portion54 remains on the surface of the receiver substrate 50 protruding fromthe surface forming one winding of a coil.

As shown in the example illustrated in FIGS. 8 a to 8 c, stress layerscan be fabricated using the process of FIGS. 7 a to 7 c for transferringa functional layer 61 onto an uneven topography of a receiver substrate60. The layer 61 might be made from any material. The layer 61 isprovided on a deformable layer 63 of a source substrate 62. As shown inFIG. 8 b, after bonding the source substrate 62 in the receiversubstrate 60, the material of the functional layer 61 is shaped by aprotruding structure 64 of the receiver substrate 60. The shape of theprotruding structure 64 is substantially arbitrary and in thisembodiment it corresponds to an arch. After removing the material of theprotruding structure 64 a pre-stressed layer has been obtained which canbe used, for example, in actuators. The stress inside the membranecombined with the actuator shape induces a bistability. Examples foractuators are any materials where a stress can be induced and which canbe actuated with electrostatic, electromagnetic, thermal orpiezoelectric actuation in order to perform a bistable actuationbehavior due to the shape given by induced stress.

In FIG. 9 an example of a 3D magnetic field sensor is illustratedproduced using the above described process. 3D field measurement (e.g.Hall sensors to measure magnetic vector) can be realized by transferringdirectional sensors on inclined surfaces having different orthogonalorientations. The different orientations of surface areas might beprovided by a conical shape of a recess 71 in a receiver substrate 70having tilted sidewalls 72 and a bottom plane 73 substantially parallelto the extension of a main surface of the receiver substrate 70.

The method of the present invention allows the combination of differentand incompatible fabrication technologies in that a plurality ofcomponents can be stacked onto each other and/or on a substrate in asingle process. This may work even if the components have to be appliedon different levels of surfaces of the receiving substrate and even if asurface which receives a component is tilted with respect to the mainsurface of the receiving substrate. The method of the present inventionallows the integration of heterogeneous devices such as RF MEMS,switches which are integrated on 3D RF waveguides, optical systemsintegration on SOC with VCSEL (III-V material), detectors (III-Vmaterial) and waveguides (silicon). Furthermore, the integration ofchemical, physical sensors and actuators, valves and pumps,microchannels for in-situ measurements may be possible therewith.

An underlying idea of the present invention is to provide a deformablelayer which is capable to absorb topography variations and followtopography differences when pressure is applied. The proposed solutionis suitable not only for the transfer of micro-devices into cavities orrecessed areas but allows also multiple transfers of the same ordifferent devices in the same process onto surfaces of differenttopography levels, including non-planar surfaces and tilted surfaces.

The invention claimed is:
 1. A device, comprising: a source substrateincluding a deformable layer; one or more components releasably attachedon one surface of the deformable layer; and a receiver surface having atopography which includes a main surface and at least one contact areaselected from the group consisting of: a recessed area, an elevatedarea, and a tilted area; wherein at least one component attached withthe source substrate is brought into contact with at least one contactarea such that the deformable layer is deformed in at least one region;the receiver surface has a recessed portion having an inclined sidewall;the components are directional sensors; and at least one of thecomponents is transferred to the inclined sidewall of the recessedportion.
 2. An article for producing an integrated device, comprising: asource substrate comprising a supporting element and a deformable layerapplied on the supporting element at a first surface of the deformablelayer; and one or more components releasably attached on a secondsurface of the deformable layer, opposite the first surface; wherein thedeformable layer is configured to deform upon the source substratecoming into contact with a receiver substrate having a topographicsurface such that the one or more components are each released from thedeformable layer and attached to respective contact areas on thetopographic surface.
 3. The article according to claim 2, wherein thesupporting element is transparent to laser light illumination in a laserablation process for releasing the components from the deformable layer.4. The article according to claim 2, wherein the one or more componentscomprise at least one element selected from the group consisting of: amechanical element, an electronic element, a sensor element, an actuatorelement, a fluidic element, an optical element, and an interconnectionelement.
 5. The article according to claim 2, further comprising anadhesive provided with the deformable layer such that the one or morecomponents are releasably attached on the second surface of thedeformable layer.
 6. The article according to claim 2, wherein thedeformable layer is an adhesive such that the one or more components arereleasably attached on the second surface of the deformable layer.
 7. Adevice, comprising: a source substrate including a deformable layer; oneor more components releasably attached on one surface of the deformablelayer; and a receiver surface having a topography which includes a mainsurface and at least one contact area selected from the group consistingof: a recessed area, an elevated area, and a tilted area; wherein atleast one component attached with the source substrate is brought intocontact with at least one contact area such that the deformable layer isdeformed in at least one region; one component is a conductive layer;the uneven topography is formed by a protruding structure; and theprotruding structure is removed after the component has been transferredto a surface of the protruding structure leaving a loop of theconductive layer extending from the receiver surface.
 8. The articleaccording to claim 7, wherein the one or more components comprise atleast one element selected from the group consisting of: a mechanicalelement, an electronic element, a sensor element, an actuator element, afluidic element, an optical element, and an interconnection element. 9.The device according to claim 7, further comprising an adhesive providedwith the deformable layer such that the one or more components arereleasably attached on the one surface of the deformable layer.
 10. Thedevice according to claim 7, wherein the deformable layer is an adhesivesuch that the one or more components are releasably attached on the onesurface of the deformable layer.
 11. The device according to claim 7,wherein a thickness of the deformable layer is more than a height of thetopography of the receiver surface.
 12. The device according to claim11, wherein a thickness of the deformable layer exceeds the height ofthe topography of the receiver surface by more than 10%.
 13. The deviceaccording to claim 7, wherein the one or more components comprise amicroelectromechanical (MEMS) system.
 14. The device according to claim7, further comprising: a supporting substrate attached on a surface ofthe deformable layer opposite to the surface on which the components areplaced.
 15. The device according to claim 14, wherein the supportingsubstrate is transparent to laser light illumination in a laser ablationprocess for releasing the components from the deformable layer.
 16. Thedevice according to claim 15, wherein the supporting substrate comprisesa transparent glass wafer.
 17. The device according to claim 7, whereinthe deformable layer comprises a perfluor-alkoxyalkan (PFA) layer. 18.The device according to claim 7, wherein the one or more componentscomprise a 3D magnetic field sensor.